MEMS is an acronym for Micro-Electro-Mechanical Systems, or Microelectromechanical Systems. MEMS are tiny, microscopic electrical and mechanical devices built using the same types of production technologies used to build silicon micro-chips for electronics and computers, and MEMS often are implemented on, or as, micro-chips. This is a new technology with a vast range of potential uses, truly a technological revolution in the making. Some experts teach that MEMS are but a precursor to an even more revolutionary technology: nanotechnology.
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- Cornell Nanofabrication Facility Provides facilities and services for fabrication of microstructures and nanostructures. Open to both academic and industrial researchers.
- Berkeley Sensor and Actuator Center (BSAC) An NSF Center for the development of microsensors, microactuators, and MEMS.
- Caltech Micromachining Laboratory University fabrication laboratory and research group. Areas of research include: sensors and actuators, fabrication, microstructures. Open to industrial users.
- Small Times News about MEMS, Nanotechnology and Microsystems
- MEMS Exchange A distributed fabrication environment providing access to various manufacturing technologies.
- trimmer.net A general resource and information page, including a collection of information and links. Contains conference information, a journal club, and tutorials on the basics of fabrication.
- MEMS Industry Group Industry association for the MEMS and microstructures industries
- MEMS Clearinghouse Contains industry news, plus job and event listings. Also, hosts several mailing lists.
- Nexus European Microsystems Network -- Nonprofit association aimed at the microsystems professional. Includes a "who's who" list, job opportunities, conferences, and user/supplier clubs.
- 2003 NanoTechnology Conference and Trade Show Conference / trade show on nanoscience, technology and business. San Francisco, CA, USA.
- Optical MEMS Group: University of Minnisota Research group of Dr. Joseph Talghader. Includes information on group members, and details of various research projects
- Advanced Micro and Nanosystems Lab University of Toronto group that focuses on bio-oriented micro and nanosystems. Research areas include MEMS and NEMS sensors and actuators, biosensors, microrobotic biomanipulation, microstructure controls, and biomechanics.
- MSM 2005 Eighth International Conference on Modeling and Simulation of Microsystems. Anaheim, California.
- MSM 2004 Seventh International Conference on Modeling and Simulation of Microsystems. Boston, MA, USA.
- MSM 2003 Sixth International Conference on Modeling and Simulation of Microsystems. Covers simulations of MEMS and other microsystems. San Francisco, CA, USA.
- Discovering MEMS and Microtechnology General information about MEMS construction.
- Center for Applied Microtechnology Provides information on the Center at the Department of Electrical Engineering, University of Washington, the research, equipment, facilities and courses.
- MemsOP Advanced design, modelling, simulation and optimization services for microsystems and microfluidic devices. FEA and CFD analysis for a fast and reliable products development.
- MEMS Blog Provides a selection of news articles concerning MEMS technology.
- The Chemical and Biological Microsystems Society CBMS is a non-profit organization with no members, aiming to promote science and engineering in the field of chemical and biological microsystems and stimulate the exchange of ideas and information between academic, industrial, and government researchers.
- MiRCTECH Microwave circuit research using technologies such as micromachining, MEMS devices and electromagnetic-bandgap (EBG) structures.
- Center for Wireless Integrated MicroSensing and Systems Research center concentrating on micropower circuits, wireless interfaces, biomedical and environmental sensors and subsystems, and advanced packaging. Includes facility and research information, and staff directory.
- Sandia MEMS Government research lab with a very large MEMS development effort. Includes tutorial, bibliography, image and movie galleries, and live MEMScam.
- Institute for Micromanufacturing Research and development facility at Louisiana Tech University with an emphasis on applied technology and commercial applications.